UM
Microstructure and optical properties of scandium oxide thin films prepared by metalorganic chemical-vapor deposition
Xu Z.2; Daga A.2; Chen H.2
2001-12-03
Source PublicationApplied Physics Letters
ISSN00036951
Volume79Issue:23Pages:3782-3784
AbstractDense, high-index, and reproducible scandium oxide (ScO) thin films with high mechanical strength were grown on glass substrates by metalorganic chemical-vapor deposition. The influence of deposition temperature on the microstructure evolution and optical properties of ScO thin films was investigated by x-ray diffraction, scanning electron microscopy, atomic-force microscopy, transmission electron microscopy, and spectrophotometry. A close relationship between microstructure and optical properties was found for ScO thin films prepared at different deposition temperatures. © 2001 American Institute of Physics.
DOI10.1063/1.1424072
URLView the original
Language英語
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Cited Times [WOS]:36   [WOS Record]     [Related Records in WOS]
Document TypeJournal article
CollectionUniversity of Macau
Affiliation1.City University of Hong Kong
2.University of Illinois at Urbana-Champaign
Recommended Citation
GB/T 7714
Xu Z.,Daga A.,Chen H.. Microstructure and optical properties of scandium oxide thin films prepared by metalorganic chemical-vapor deposition[J]. Applied Physics Letters,2001,79(23):3782-3784.
APA Xu Z.,Daga A.,&Chen H..(2001).Microstructure and optical properties of scandium oxide thin films prepared by metalorganic chemical-vapor deposition.Applied Physics Letters,79(23),3782-3784.
MLA Xu Z.,et al."Microstructure and optical properties of scandium oxide thin films prepared by metalorganic chemical-vapor deposition".Applied Physics Letters 79.23(2001):3782-3784.
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