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Rotary Flexure Micropositioning Stage with Large Rotational Range
Qingsong XU
Rights HolderUniversity of Macau
Date Available2016-02-11
CountryUnited States
Contribution Rank1

A stage assembly for supporting articles, the stage assembly uses one or more intermediate stage modules. Each module has a plurality of compound radial flexures (CRFs), extending radially from a base or an intermediate stage module, and allowing rotational movement about a center axis. The CRFs each have a flat profile, with a long side of the profile aligned perpendicularly to the direction of rotation of the stage modules so that the CRFs have more flexibility in the direction of rotation than obliquely to the direction of rotation. Movement of a last of the stage modules results in deflection of the CRFs between each successive stage module, with partial movement of each stage module between the base and the last of the stage modules, the last of the stage modules provided as a primary stage module.

Application Date2014-08-08
Patent NumberUS20160041378A1
Application NumberUS14454845
Open (Notice) NumberUS20160041378A1
Fulltext Access
Document TypePatent
AffiliationUniversity of Macau
First Author AffilicationUniversity of Macau
Recommended Citation
GB/T 7714
Qingsong XU. Rotary Flexure Micropositioning Stage with Large Rotational Range. US20160041378A1.
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