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A 1.3-micrometre-thick elastic conductor for seamless on-skin and implantable sensors
Jiang, Zhi1,2; Chen, Nuan2; Yi, Zhigao3; Zhong, Junwen4,8; Zhang, Feilong2; Ji, Shaobo2; Liao, Rui5; Wang, Yan6; Li, Haicheng2; Liu, Zhihua7; Wang, Yang5; Yokota, Tomoyuki6; Liu, Xiaogang3; Fukuda, Kenjiro1,8; Chen, Xiaodong2,7; Someya, Takao1,6,8
2022-11-01
Source PublicationNature Electronics
Volume5Issue:11Pages:784-793
AbstractOn-skin and implantable electronics require elastic conductors that are only a few micrometres thick and soft enough to form a seamless contact with three-dimensional structures. However, fabricating thin conductors that are mechanically durable and have consistent electrical properties with stretching is challenging. Here we report polydimethylsiloxane (PDMS)–gold conductors that are around 1.3 µm thick and have a controlled morphology of microcracks in the gold film. The microcracks are formed by evaporating a 50-nm-thick gold film onto a 1.2-µm-thick PDMS film that is supported during fabrication by a 100-µm-thick PDMS film on glass; thermal expansion of the thick PDMS film causes the evaporated gold to form a microcracked structure on the thin PDMS. The resulting conductors can be stretched by up to 300% and remain highly conductive after strain release. We use them to create on-skin electrodes that are breathable and water resistant, and can continuously record electrocardiogram signals. We also use the conductors to create on-skin sensors with less than 3 µm thickness that can detect small mechanical forces and create implantable nerve electrodes that can provide signal recording and stimulation.
DOI10.1038/s41928-022-00868-x
URLView the original
Language英語English
Scopus ID2-s2.0-85142296797
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Cited Times [WOS]:1   [WOS Record]     [Related Records in WOS]
Document TypeJournal article
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
Affiliation1.Thin-Film Device Laboratory, RIKEN, Wako, Saitama, Japan
2.Innovative Center for Flexible Devices (iFLEX), School of Materials Science and Engineering, Nanyang Technological University, Singapore, Singapore
3.Department of Chemistry, National University of Singapore, Singapore, Singapore
4.Department of Electromechanical Engineering and Centre for Artificial Intelligence and Robotics, University of Macau, Macao
5.State Key Laboratory of Electronic Thin Films and Integrated Devices, School of Optoelectronic Science and Engineering, University of Electronic Science and Technology of China (UESTC), Chengdu, China
6.Department of Electrical Engineering and Information Systems, The University of Tokyo, Tokyo, Japan
7.Institute of Materials Research and Engineering, Agency for Science, Technology and Research (A*STAR), Singapore, Singapore
8.Center for Emergent Matter Science, RIKEN, Wako, Saitama, Japan
Recommended Citation
GB/T 7714
Jiang, Zhi,Chen, Nuan,Yi, Zhigao,et al. A 1.3-micrometre-thick elastic conductor for seamless on-skin and implantable sensors[J]. Nature Electronics,2022,5(11):784-793.
APA Jiang, Zhi,Chen, Nuan,Yi, Zhigao,Zhong, Junwen,Zhang, Feilong,Ji, Shaobo,Liao, Rui,Wang, Yan,Li, Haicheng,Liu, Zhihua,Wang, Yang,Yokota, Tomoyuki,Liu, Xiaogang,Fukuda, Kenjiro,Chen, Xiaodong,&Someya, Takao.(2022).A 1.3-micrometre-thick elastic conductor for seamless on-skin and implantable sensors.Nature Electronics,5(11),784-793.
MLA Jiang, Zhi,et al."A 1.3-micrometre-thick elastic conductor for seamless on-skin and implantable sensors".Nature Electronics 5.11(2022):784-793.
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