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A Review on Actuation and Sensing Techniques for MEMS-based Microgrippers
Sijie Yang; Qingsong Xu
Source PublicationJournal of Micro-Bio Robotics

Microelectromechanical system (MEMS) reveals excellent flexibility and adaptability in miniaturization devices owing to its compact dimension, low power consumption, and fine performance. As a typical type of miniaturization tool, MEMS-based robotic microgripper has been widely employed in the manipulation of tiny micro-objects, material characterizations, and so on. This paper presents the state-of-the-art survey of prevalent MEMS-based actuation and sensing techniques, which can be applied in microgrippers. Five main types of actuators are reviewed in this survey, namely, electro-thermal actuators, electrostatic actuators, shape memory alloy actuators, piezoelectric actuators, and electromagnetic actuators. A review of recent sensing techniques is also conducted, which includes four popular sensing approaches in terms of capacitive sensors, electrothermal sensors, piezoresistive sensors, and piezoelectric sensors. Their advantages, disadvantages, and applications have been discussed in detail. Some perspectives on the future development are presented.

KeywordMicroelectromechanical System (Mems) Actuator Sensor Microgripper
WOS Research AreaRobotics
WOS SubjectRobotics
WOS IDWOS:000414029500001
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Cited Times [WOS]:79   [WOS Record]     [Related Records in WOS]
Document TypeJournal article
CollectionFaculty of Science and Technology
Corresponding AuthorQingsong Xu
AffiliationDepartment of Electromechanical Engineering, Faculty of Science and TechnologyUniversity of Macau, Avenida da UniversidadeTaipaChina
First Author AffilicationFaculty of Science and Technology
Corresponding Author AffilicationFaculty of Science and Technology
Recommended Citation
GB/T 7714
Sijie Yang,Qingsong Xu. A Review on Actuation and Sensing Techniques for MEMS-based Microgrippers[J]. Journal of Micro-Bio Robotics,2017,13(1-4):1–14.
APA Sijie Yang,&Qingsong Xu.(2017).A Review on Actuation and Sensing Techniques for MEMS-based Microgrippers.Journal of Micro-Bio Robotics,13(1-4),1–14.
MLA Sijie Yang,et al."A Review on Actuation and Sensing Techniques for MEMS-based Microgrippers".Journal of Micro-Bio Robotics 13.1-4(2017):1–14.
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