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An Overview of Micro-Force Sensing Techniques
Yuzhang Wei; Qingsong Xu
Source PublicationSensors and Actuators A: Physical

Due to the trend of miniaturization of devices, micromanipulation has been a hot topic in the last two decades. Unlike the macro world, the micro object is easy to be damaged if the contact force is not reliably detected and controlled. Hence, micro-force sensing is of great importance in micromanipulation, microassembly, medical applications, biomedical applications, materials science, dimension measurements and MEMS/NEMS for protecting micro-parts and micro-gripper from being damaged and ensuring the success of the manipulation process. This paper presents a survey of the recent methods of micro-force sensing. The working principle, detection accuracy, advantage and disadvantage of seven widely used force sensing methods are presented. Typical applications of each method in micro-assembly and micromanipulation are discussed. In addition, the comparisons among different kinds of force sensing approaches have been addressed. Moreover, another five promising micro-force sensing methods, which are confined to special component measurements or not widely used, are briefly introduced. Furthermore, two popular types of commercial micro-force sensors are listed to provide a guideline of selection for a specific application. The presented state-of-the-art overview is helpful to those engaged in micro-force sensing area to know the recent development and research tendency on micro-force sensing.

KeywordMicro-force Sensing Force Sensors Micro-assembly Micromanipulation
WOS Research AreaEngineering ; Instruments & Instrumentation
WOS SubjectEngineering, Electrical & Electronic ; Instruments & Instrumentation
WOS IDWOS:000363826400043
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Cited Times [WOS]:58   [WOS Record]     [Related Records in WOS]
Document TypeJournal article
CollectionFaculty of Science and Technology
Corresponding AuthorQingsong Xu
AffiliationDepartment of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Avenida da Universidade, Tapia, Macau, China
First Author AffilicationFaculty of Science and Technology
Corresponding Author AffilicationFaculty of Science and Technology
Recommended Citation
GB/T 7714
Yuzhang Wei,Qingsong Xu. An Overview of Micro-Force Sensing Techniques[J]. Sensors and Actuators A: Physical,2015,234(1):359-374.
APA Yuzhang Wei,&Qingsong Xu.(2015).An Overview of Micro-Force Sensing Techniques.Sensors and Actuators A: Physical,234(1),359-374.
MLA Yuzhang Wei,et al."An Overview of Micro-Force Sensing Techniques".Sensors and Actuators A: Physical 234.1(2015):359-374.
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