Design and Modeling of a Novel 3-DOF Large-Travel Parallel Micro/Nano-Positioning Stage

Status	已發表Published
	Design and Modeling of a Novel 3-DOF Large-Travel Parallel Micro/Nano-Positioning Stage
	Zhang, Xiaozhi; Xu, Qingsong; IEEE
	2017
Conference Name	IECON 2017 - 43RD ANNUAL CONFERENCE OF THE IEEE INDUSTRIAL ELECTRONICS SOCIETY
Pages	2840-2845
Publication Place	345 E 47TH ST, NEW YORK, NY 10017 USA
Publisher	IEEE
Abstract	Limited travel constrains the widely application of XYZ parallel micro/nano-positioning stage. In this paper, a novel parallel-kinematics micro/nano-positioning stage is proposed with the goal of enlarging the travel range. In order to obtain a large input displacement for actuating the stage, voice coil motors (VCM) are adopted. For a large-travel parallel stage, the cross-axis motion increases the difficulty of closed loop control process. Thus, the I-shaped flexure hinges are employed to decouple the parallel stage's motion. In view of the lower output force of the VCM, the guiding flexure mechanism is designed with an optimized sectional dimension of 140 mm x 44 mm. To verify the performance of the stage, analytical modeling and simulation study are conducted. Results show that the proposed large-travel parallel micro/nano-positioning stage owns the 3-DOF motion range of 3.527 mm, an oversize of 176 mm x 176 mm x 198 mm, and negligible isolation ratio of 0.0034%.
URL	View the original
Indexed By	CPCI
Language	英語English
WOS Research Area	Engineering
WOS Subject	Engineering, Industrial ; Engineering, Electrical & Electronic
WOS ID	WOS:000427164802135
The Source to Article	WOS
Fulltext Access	View Full-Text via DOI View Full-Text via Web of Science
Citation statistics	Cited Times [WOS]:1 [WOS Record] [Related Records in WOS]
Document Type	Conference paper
Collection	University of Macau
Recommended Citation GB/T 7714	Zhang, Xiaozhi,Xu, Qingsong,IEEE. Design and Modeling of a Novel 3-DOF Large-Travel Parallel Micro/Nano-Positioning Stage[C]. 345 E 47TH ST, NEW YORK, NY 10017 USA:IEEE,2017:2840-2845.
APA	Zhang, Xiaozhi,Xu, Qingsong,&IEEE.(2017).Design and Modeling of a Novel 3-DOF Large-Travel Parallel Micro/Nano-Positioning Stage.,2840-2845.

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