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Highly Sensitive Capacitive Pressure Sensor Based on a Micropyramid Array for Health and Motion Monitoring
Zhang, Zian1; Gui, Xuchun1; Hu, Qingmei1; Yang, Leilei1; Yang, Rongliang1; Huang, Bingfang1; Yang, Bo Ru1; Tang, Zikang2
2021-07-01
Source PublicationAdvanced Electronic Materials
ISSN2199-160X
Volume7Issue:7
Abstract

Flexible capacitive pressure sensors with simple structure and low power consumption have attracted great interest because of their promising applications in wearable electronics. However, assembling a pressure sensor with high sensitivity, low detection limit, and wide dynamic range is still a big challenge. Here, a sandwich-like, flexible capacitive pressure sensor is reported with micropyramid array electrode and porous dielectric layer. Under external stimulus pressure, the distance between two electrodes, and dielectric constant of dielectric layer will change simultaneously, resulting in high sensitivity (2.51 kPa) of the sensor. Due to the micropyramid array electrode, the sensor exhibits low detection limit (2.0 Pa), fast response speed (84 ms), wide working range (>10 kPa), and high stability (>5000 dynamic cycles). Finite-element analysis also reveals that the larger duty ratio and altitude of micropyramid arrays lead to higher sensor sensitivity. By depicting the deformation of micropyramid during compression, the sensing mechanism of these sensors is discovered, providing a potential direction for developing sensitivity and linear range. Additionally, the sensor has been demonstrated to be efficient in monitoring human motion, such as muscle activation and rope skipping, showing high potential in the field of sport wearable equipment.

KeywordCapacitive Pressure Sensors Flexible Electronics Micropyramid Arrays Sandwich-like Structures
DOI10.1002/aelm.202100174
URLView the original
Indexed BySCIE
Language英語English
WOS Research AreaScience & Technology - Other Topics ; Materials Science ; Physics
WOS SubjectNanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied
WOS IDWOS:000651824000001
Scopus ID2-s2.0-85105945471
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Cited Times [WOS]:16   [WOS Record]     [Related Records in WOS]
Document TypeJournal article
CollectionINSTITUTE OF APPLIED PHYSICS AND MATERIALS ENGINEERING
Corresponding AuthorGui, Xuchun; Yang, Bo Ru
Affiliation1.State Key Laboratory of Optoelectronic Materials and Technologies, School of Electronics and Information Technology, Sun Yat-sen University, Guangzhou, 510275, China
2.Institute of Applied Physics and Materials Engineering, University of Macau, Taipa, 999078, China
Recommended Citation
GB/T 7714
Zhang, Zian,Gui, Xuchun,Hu, Qingmei,et al. Highly Sensitive Capacitive Pressure Sensor Based on a Micropyramid Array for Health and Motion Monitoring[J]. Advanced Electronic Materials,2021,7(7).
APA Zhang, Zian,Gui, Xuchun,Hu, Qingmei,Yang, Leilei,Yang, Rongliang,Huang, Bingfang,Yang, Bo Ru,&Tang, Zikang.(2021).Highly Sensitive Capacitive Pressure Sensor Based on a Micropyramid Array for Health and Motion Monitoring.Advanced Electronic Materials,7(7).
MLA Zhang, Zian,et al."Highly Sensitive Capacitive Pressure Sensor Based on a Micropyramid Array for Health and Motion Monitoring".Advanced Electronic Materials 7.7(2021).
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