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Design and control of a novel electromagnetic actuated 3-DoFs micropositioner
Xiao, Xiao1; Xi, Ruidong2; Li, Yangmin3; Tang, Yirui4; Ding, Bingxiao5; Ren, Hongliang6; Meng, Max Q.H.1
Source PublicationMicrosystem Technologies

In this paper, a novel electromagnetic micropositioner is designed from an orthogonal 3-P(4S) parallel mechanism through the substitution method and modular design techniques. Preliminary prototype experiments show that the micropositioner possesses an excellent decoupling performance. Thus an independent control strategy is carried out for the motion control of the micropositioner. An RBF neural networks based adaptive backstepping terminal sliding mode controller is designed according to the nonlinearity characteristics of the actuator. Parameters of the system are identified with a genetic algorithm. Finally, the performances of the micropositioner and the developed control strategy are verified. Experimental results demonstrate that satisfactory performances can be achieved.

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Indexed BySCIE
WOS Research AreaEngineering ; Science & Technology - Other Topics ; Materials Science ; Physics
WOS SubjectEngineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied
WOS IDWOS:000607032500001
Scopus ID2-s2.0-85099336767
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Cited Times [WOS]:2   [WOS Record]     [Related Records in WOS]
Document TypeJournal article
CollectionUniversity of Macau
Corresponding AuthorLi, Yangmin; Meng, Max Q.H.
Affiliation1.Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen, 518055, China
2.Department of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Macao
3.Department of Industrial and Systems Engineering, The Hong Kong Polytechnic University, Hong Kong
4.Institute of Applied Physics and Materials Engineering, University of Macau, Macao
5.Department of Mechanical Engineering, Jishou University, Jishou, 416000, China
6.Department of Biomedical Engineering, National University of Singapore, Singapore, 117580, Singapore
Recommended Citation
GB/T 7714
Xiao, Xiao,Xi, Ruidong,Li, Yangmin,et al. Design and control of a novel electromagnetic actuated 3-DoFs micropositioner[J]. Microsystem Technologies,2021,27(10):3763-3772.
APA Xiao, Xiao,Xi, Ruidong,Li, Yangmin,Tang, Yirui,Ding, Bingxiao,Ren, Hongliang,&Meng, Max Q.H..(2021).Design and control of a novel electromagnetic actuated 3-DoFs micropositioner.Microsystem Technologies,27(10),3763-3772.
MLA Xiao, Xiao,et al."Design and control of a novel electromagnetic actuated 3-DoFs micropositioner".Microsystem Technologies 27.10(2021):3763-3772.
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