| Status | 已發表Published |
| Design and analysis of a new XYZ parallel flexure stage | |
Zhang, Xiaozhi; Xu, Qingsong
| |
| 2015 | |
| Conference Name | 14th International Federation for the Promotion of Mechanism and Machine Science World Congress, IFToMM 2015 |
| Source Publication | 2015 IFToMM World Congress Proceedings, IFToMM 2015 |
| Conference Date | 10 25, 2015 - 10 30, 2015 |
| Conference Place | Taipei, Taiwan |
| Author of Source | National Taiwan University |
| Abstract | In this paper, the design of a new compliant XYZ totally decoupled parallel-kinematic nanopositioning stage based on flexure mechanism is presented, which is driven by PZT actuators. The output of the flexure stage is enlarged by a compound amplifier of three order based on bridge principle with the amplification ratio of As3 which is larger than the ratio of As for one simple amplifier. The three-dimensional amplifier can overcome the shortage of the displacement limitation of the actuator. The flexure stage with three actuators can obtain the motion along X, Y and Z axes with cross-axis errors less than 1% and the natural frequency larger than 100 Hz. In order to verify the dimension of the objective stage simulation GA method is conducted. FEA simulation results demonstrate the performance of the designed multi-axis nanopositioning stage. |
| DOI | 10.6567/IFToMM.14TH.WC.OS3.034 |
| Language | 英語English |
| Fulltext Access | |
| Citation statistics | |
| Document Type | Conference paper |
| Collection | DEPARTMENT OF ELECTROMECHANICAL ENGINEERING |
| Affiliation | University of Macau, China |
| First Author Affilication | University of Macau |
| Recommended Citation GB/T 7714 | Zhang, Xiaozhi,Xu, Qingsong. Design and analysis of a new XYZ parallel flexure stage[C]//National Taiwan University,2015. |
| APA | Zhang, Xiaozhi,&Xu, Qingsong.(2015).Design and analysis of a new XYZ parallel flexure stage.2015 IFToMM World Congress Proceedings, IFToMM 2015. |
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