UM  > Faculty of Science and Technology  > DEPARTMENT OF ELECTROMECHANICAL ENGINEERING
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Design and simulation a MEMS microgripper with integrated electrothermal actuator and force sensor
Sijie Yang; Qingsong Xu
2016-10-27
Conference Name2016 International Conference on Advanced Robotics and Mechatronics (ICARM)
Source PublicationICARM 2016 - 2016 International Conference on Advanced Robotics and Mechatronics
Pages271-276
Conference Date18-20 Aug. 2016
Conference PlaceMacau, China
Abstract

The conceptual design of a novel compliant microelectromechanical systems (MEMS)-based gripper equipped with elecrothermal actuating as well as electrothermal force sensing is introduced in this paper. By this design combination, the device possesses some unique characteristics including a small and compact footprint size, and a large and steady force from the thermal actuator. Simulation results show that the thermal actuator produces the gripping force to execute the gripping operation with a range of approximately 85 μm under a low source voltage of 2 V. At the same time, owning to a compliant rotation bearing, a large displacement of gripping range is obtained. The established theoretical models have a coincident matching with the FEA simulation results, which verifies the feasible design of the gripper in this work.

DOI10.1109/ICARM.2016.7606931
URLView the original
Indexed ByCPCI-S
Language英語English
WOS Research AreaEngineering ; Robotics
WOS SubjectEngineering, Electrical & Electronic ; Robotics
WOS IDWOS:000386653600047
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Citation statistics
Cited Times [WOS]:2   [WOS Record]     [Related Records in WOS]
Document TypeConference paper
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
Corresponding AuthorQingsong Xu
AffiliationDepartment of Electromechanical Engineering, Faculty of Science and Technology University of Macau
First Author AffilicationFaculty of Science and Technology
Corresponding Author AffilicationFaculty of Science and Technology
Recommended Citation
GB/T 7714
Sijie Yang,Qingsong Xu. Design and simulation a MEMS microgripper with integrated electrothermal actuator and force sensor[C],2016:271-276.
APA Sijie Yang,&Qingsong Xu.(2016).Design and simulation a MEMS microgripper with integrated electrothermal actuator and force sensor.ICARM 2016 - 2016 International Conference on Advanced Robotics and Mechatronics,271-276.
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