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Fabrication and oxidation of amorphous Zr-based alloy for imprint lithography Journal article
Microelectronic Engineering, 2022,Volume: 256
Authors:  Li, Mingjie;  Luo, Wenxin;  Xu, Jingfu;  Zhang, Juan;  Ng, Kar Wei;  Cheng, Xing
Favorite |  | TC[WOS]:0 TC[Scopus]:0 | Submit date:2022/03/04
Electrodeposition  Imprint Lithography  Oxidation  Sputtering  
Fabrication and oxidation of amorphous Zr-based alloy for imprint lithography Journal article
Microelectronic Engineering, 2022,Page: 111722-111722
Authors:  Li, M;  Luo, W;  Xu, J;  Zhang, J;  Ng, K. W.;  Cheng, X
Favorite |  | TC[WOS]:0 TC[Scopus]:0 | Submit date:2022/08/01
Imprint lithography  Sputtering  Electrodeposition  Oxidation